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Can slitting be applied to micro/nano sized applications?

applications applied Micro Nano sized slitting
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Can slitting be applied to micro/nano sized applications?

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Yes. See the 2004 paper by K.J. Kang et al. Using focused ion beam (FIB) machining, one can make a sub-micron sized slit. SEM imaging can then get nanometer-scale displacements.

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