Does SEMI have standards for cleanrooms?
Other than SEMI F21 – Classification Of Airborne Molecular Contaminant Levels In Clean Environments, SEMI does not possess any specifications for cleanrooms. The two most often specifications cited in SEMI Standards for cleanroom cleanliness are: ISO 14644 – Cleanrooms and Associated Controlled Environments Part 1: Classification of Air Cleanliness Federal Standard 209E – Clean Room and Work Station Requirements, Controlled Environments Federal Standard 209E – Clean Room and Work Station Requirements, Controlled Environments is also still cited in some standards. However, please note that the U.S. General Services Administration released a notice of cancellation for this document in November 2001. In that notice, ISO 14644 Part 1 (Classification of air cleanliness) and Part 2 (Specifications for testing and monitoring to prove continued compliance with ISO 14644-1) were specifically mentioned as superseding FED-STD-209E.