Does testing present any danger of damage to the tool?
No. The tests are not destructive nor should they pose any danger to the tools integrity. FACTS personnel will never directly operate a customers tool. As a condition of our testing, your tool must be under the direct control and supervision of a knowledgeable employee/operator from your company at all times during the testing process. There is, however, always the possibility that your tools software will have a bug or a problem that will be uncovered for the first time under testing by FACTS. This may cause irregular, erratic, or other unexpected behavior of your tool. Our experience has been that these kinds of problems are most often manifested in a tools robotics or material movement functionality and will sometimes lead to test wafer breakage, mechanical jams, or other similar problems.
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