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What happens to Stress and Optical Properties when TiO2 Films are Annealed?

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What happens to Stress and Optical Properties when TiO2 Films are Annealed?

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Titania is a favorite material for visible-range coatings because of its high refractive index and because many dozens of deposition-related papers have appeared that teach the optimum processes for producing good films with reasonable ease. Titania is mostly used in AR coatings for ophthalmic, instrument panel, and architectural window coatings. Past CMN issues have discussed this material, its starting material forms and proper pre-evaporation conditioning, and its optical properties. A recent study of the deposition process-dependent stress and optical properties has been reported [3]. The deposition processes for the films were: E-beam with IAD (EIAD), RF ion-beam sputtering with IAD, and DC magnetron sputtering with IAD. The researchers studied the effect of thermal annealing in air on stress, n and k, and roughness after exposure in 50 C temperature steps from 100 C to 300 C. EIAD started with Ti3O5, the recommended source composition; the sputter targets were 99.99% Ti metal. An

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