Which lithography systems is the PSFM reticle compatible with?
The PSFM reticle is presently used on every brand of stepper-lithography tool (Both step-and-repeat and step-and-scan systems) available, including: • ASML • Nikon • Canon • Ultratech • SVGL • GCA/ISI Customer-gathered data is available for most of these systems, and a list of technical papers can be found in our Tools & Resources section.