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Which overlay measurement tools is the PSFM Reticle compatible with?

April 26, 2017compatible measurement overlay psfm reticle tools

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Which overlay measurement tools is the PSFM Reticle compatible with?

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The PSFM reticle allows data to be automatically collected and analyzed by several overlay measurement tools, including those brands from KLA-Tencor, NanoMetrics, Biorad, and IVS. Standard software available on these systems can be used for rapid evaluation of the focus data collected, and other software solutions can be used (go to PSFM DATA!TM Focus Analysis Software for more information). For information on whether your metrology tool is compatible with the PSFM reticle, contact us.