Which SEMI standards define specification for polished single crystal silicon wafer or polycrystalline silicon?
SEMI M1 – Specifications for Polished Single Crystal Silicon Wafers This specification provides the essential dimensional and certain other common characteristics of silicon wafers, including polished wafers as well as substrates for epitaxial and certain other kinds of silicon wafers. These specifications cover ordering information and certain requirements for high-purity, single crystal polished silicon wafers used in semiconductor device and integrated circuit manufacturing or as substrates (or starting wafers) for other kinds of wafers, including epitaxial, annealed, and SOI wafers. Wafer sizes include 2 inch, 3 inch, 100, 125, 150, 200, and 300 mm. SEMI M16 – Specification for Polycrystalline Silicon This specification is intended for use in procurement of polycrystalline silicon for growth of electronic grade monocrystalline silicon ingots. Such ingots are sliced into wafers that are subsequently used for the production of semiconductor devices, integrated circuits, and other mic
