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Who is using the Focus Monitor Reticle?

focus monitor reticle
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Who is using the Focus Monitor Reticle?

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The PSFM reticle is employed by both lithography tool manufacturers and end users. Major chipmakers throughout the world use the PSFM reticle in a variety of applications. The PSFM Reticle is compatible with all brands of scanner and stepper-lithography equipment; data has been collected on ASML, Nikon, Canon, Ultratech Stepper and other older system brands such as SVGL and GCA.

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