EBID is short for Electron Induced Beam Deposition; sometimes referred to as SEM burn or raster burn. This effect is seen in all electron beam imaging systems. A user can usually see a dark box on the sample after imaging the same area for longer than 10 minutes. The presence of this box is sometimes not seen because of the beam energy or detector used but it is always present. Diffuse hydrocarbons cover the sample, stage, and chamber walls of the SEM. As the E beam rasters across the sample the hydrogen atoms are knocked off leaving sp3 hybridized carbon on the sample. This is a diamond-like film that is completely insulating. More diffuse hydrocarbons move into the area and the process continues. A very thick layer can be built in the time it takes to probe the device. Zyvex has a tool called the Optimizer to clean the chamber and sample of these diffuse hydrocarbons before probing and imaging begins. This insures a clean environment for long probing sessions.