Does SEMI have standards for Deionized (DI) or Ultra Pure Water?
Five SEMI standards are related to ultrapure water. The first one (PV3) is for photovoltaic cell processing application, while the other four are pertinent to semiconductor industry. SEMI PV3 – Guide for High Purity Water Used in Photovoltaic Cell Processing This guide is provided for multiple purposes. It may be used as a basis for establishing performance criteria for purchases of new High Purity Water (HPW) equipment. It may also be used internally by facility engineers to set process control parameters for the operation of their HPW systems. This guide may be used by process engineers to establish reasonable expectations about the quality of the HPW being supplied to them by facilities. SEMI F61- Guide for Ultrapure Water System Used in Semiconductor Processing This guide establishes the typical definitional requirements for an ultrapure water (UPW) system used in semiconductor manufacturing. It is intended to establish a common basis for developing detailed specifications in subse
