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What is the manipulation movement resolution?

April 26, 2017manipulation movement resolution

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What is the manipulation movement resolution?

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Movement resolution is 100 nanometers in the coarse motion mode. Range is 12mm in each of the X, Y, and Z axes for the coarse positioning. The fine positioning mode achieves movement resolution of less than 5 nanometers in three dimensions. The fine positioning can be achieved over a total motion range of 100 microns in the X and Z axes, and 10 microns in the Y axis of each positioner.