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What is the Optimizer?

April 26, 2017optimizer

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What is the Optimizer?

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The Optimizer is a downstream ashing tool that uses a plasma outside of the chamber to inject free radical oxygen into the vacuum system. This free radical oxygen scrubs the chamber of hydrocarbons that lead to Electron Beam Induced Deposition (a fancy term for contamination). The Optimizer is vital if the user wants to make ohmic contact with the sample for electrical characterization.